Refurbished Edwards Kronis
The Edwards Kronis was introduced to fill a niche in the low-k dielectric CVD applications of semiconductor fabrication plants. Based upon the TPU and TCS systems, the Kronis is designed to handle the specific compoundstrimethylsilane, tetramethylsilane and dimethyldimethyloxysilane.
The Kronis can be configured with 1-4 inlets. It is typically integrated into the parent tool or chamber’s control system such that unit’s status (on or offline) is known to the equipment operator.
Trillium provides end users with refurbished Kronis system, spare parts and on-site service to improve system reliability and uptime.
|Fuel Type||Typical Applications||Voltage||Inlets|
|CH4||CVD||110/230 1 Ph||1-4|