Refurbished Ebara A150W Dry Pumps
This Ebara A150W is a Multi Stage Dry Pump part of the second generation of dry pumping solutions introduced by Ebara. It includes various sensors and controls reporting to the handheld LCD display or to a parent vacuum chamber to enhance the operation. The A150W features a dry pump and blower both with water cooled canned motor driving tri lobe roots rotors pumping technology. The A150W is an excellent choice for a wide range of applications where higher pumping speed are required, such as PECVD and LPCVD. Ebara offered the A150W in two different varieties. The A150W-T, has U-tubes between each compression stage to allow the deposition of byproduct outside the pump’s swept volume. The other variant, the A150W-M, use has no-interstage exhaust gas coolers, but instead has a heated exhaust trap between the pump exhaust and the facilities exhaust connection.
|Pumping Speed||Ultimate Pressure||Motor Power||Inlet||Exhaust|
|640 CFM||1 mTorr||7.4 kW||ISO100||NW40|