Refurbished Edwards EPX180 Dry Pumps
The EPX180 Dry Pumps offers on-tool pumping in a lighter and smaller package, requiring only 1.4 kilowatts of power. As the replacement for IPX100 series pumps, the EPX180 uses a unique, patented, single-shaft regenerative/ Holweck® stage mechanism. EPX pumps are capable of pumping from atmosphere to ultimate pressures below 1x 10-5 Torr.
Offering enhanced performance in a modular package, EPX pumps can be integrated onto a process tool or mounted remotely. Integrated electronics also provide simple communication connections to the process tool.
The EPX Series supports clean and light duty semiconductor processing applications such as load lock and transfer applications.
|Pumping Speed||Ultimate Pressure||Motor Power||Inlet||Exhaust|
|104 CFM||7.5 x 10-5 Torr||1.4 kW||ISO63||NW25|