Refurbished Edwards EPX500 Dry Pumps
The EPX500 Dry Pumps offers on-tool pumping in a lighter and smaller package, requiring only 1.4 kilowatts of power. As the replacement for IPX500 series pumps, the EPX500 uses a unique, patented, single-shaft regenerative/ Holweck® stage mechanism. EPX pumps are capable of pumping from atmosphere to ultimate pressures below 1×10-5 Torr.
Offering enhanced performance in a modular package, EPX pumps can be integrated onto a process tool or mounted remotely. Integrated electronics also provide simple communication connections to the process tool.
The EPX Series supports clean and light duty semiconductor processing applications such as load lock and transfer applications.
|Pumping Speed||Ultimate Pressure||Motor Power||Inlet||Exhaust|
|294 CFM||7.5 x 10-7 Torr||1.4 kW||ISO160||NW25|