Modern semiconductor manufacturing processes continue to evolve and include the use of more and more gases requiring some form of gas abatement. Whether for protection of personnel and facilities infrastructure or to meet company or government pollution prevention mandates, there are a number of gas abatement technologies available to meet your objectives.
Trillium specializes in providing customers new and remanufactured abatement systems, on site service, and spare parts for the following types of abatement:
- Dry Abatement Systems
- Wet Abatement Systems
- Hybrid Abatement Systems