Solid State Cooling Nikola 3K and 5K Chiller
Designed specifically for the toughest Semiconductor Etch applications, the Nikola 3K/5K provides precise temperature control while using 60% less electrical power. With only two moving parts and no compressor, this thermoelectric-based chiller is known for high reliability and long life. The Nikola 3K/5K reduces environmental impacts by consuming less power, reducing air conditioning load by ~50% and not requiring any Freon or other chemical refrigerants
The Nikola 3K/5K is offered in multiple configurations based upon the specific process tool and communications interface. Currently, we offer these for most Lam Research, Tokyo Electron and Applied Materials Etch platforms as listed below.
| Specification | Nikola 3K L1 | Nikola 3K L1-DC1 | Nikola 3K T1 | Nikola 3K T2 | Nikola 5K T2 |
|---|---|---|---|---|---|
| Part Number | 10-13727-3K-2-L1 | 10-13727-3K-2-L1-DC1 | 10-13727-3K-2-T1 | 10-13727-3K-2-T2 | 10-13727-5K-2-T2 |
| Tool Type | LAM Rainbow and Alliance | LAM Rainbow and Alliance | TEL Unity II | TEL Unity II | TEL Unity M |
| Interface | LAM Single Channel Analog | LAM Dual Channel Analog (Master) | TEL Unity II | TEL Unity M | TEL Unity M |
| Temp Range | -10C to 80C (with CDA or N2 Purge) | -10C to 80C (with CDA or N2 Purge) | -10C to 80C (with N2 Option) | -10C to 80C (with N2 Option) | -10C to 80C (with N2 Option) |
| Cooling Capacity @ 20°C with 20°C facility water | Up to 3 kW | Up to 3 kW | Up to 3 kW | Up to 3 kW | Up to 5 kW |
| Flow Rate at 30 PSI with HFE | 38 lpm (10 GPM) | 38 lpm (10 GPM) | 38 lpm (10 GPM) | 38 lpm (10 GPM) | 38 lpm (10 GPM) |
| Dimensions & Weight | 22″ x 28″ x 35″ / 300 lbs | 22″ x 28″ x 35″ / 300 lbs | 22″ x 28″ x 35″ / 300 lbs | 22″ x 28″ x 35″ / 300 lbs | 22″ x 28″ x 35″ / 300 lbs |
