Refurbished Vector Ultra 3000 Wet Scrubber
The Vector Ultra 3000 is a wet scrubber type abatement system originally produced by Ecosys, who were subsequently acquired (in chronological order) by ATMI, Metron and Applied Materials. Currently the Vector Ultra 3000 is manufactured in Taiwan. Although capable of abating Epitaxy and Tungsten CVD processes, the Vector Ultra 3000 is primarily used in Etch applications.
The Vector Ultra 3000 can be configured with 1-4 inlets, with the inlet’s entry type being specific for different applications to handle concerns such as clogging and corrosion.
Trillium provides end users with refurbished Vector Ultra 3000s, spare parts and on-site service to improve system reliability and uptime.
Specifications for the Vector Ultra 3000 are below.
|Inlets||Voltage||Dimensions (WDH)||Max Flow Rates|
|1-4||200-230V 3 Ph||27″ x 36.3″ x 84″||250 SLM|