Refurbished Ebara 50×20 Dry Pumps
The Ebara 50×20 is part of Ebara’s UERR series of multi-stage roots dry pumps. Although fairly crude by today’s standards, the 50×20 features a dry pump and blower both with water cooled canned motor driving tri lobe roots rotors. The 50×20 was offered with 3” inter-stage coolers designed to force deposition of byproduct outside the swept volume for dirty process. To aid with more difficult processes, the 50×20 features extensive Nitrogen purging systems designed to both enable the integral labyrinth oil seal design, but to also provide inert dilution of process gases.
UERR Series pumps were often fitted with control boxes designed to both operate and monitor the pump, but also to interface the pump to a process tool.
|Pumping Speed||Ultimate Pressure||Motor Power||Inlet||Exhaust|
|127 CFM||4 mTorr||6.4 kW||NW50||NW40|