Refurbished Edwards M150 GRC
The Edwards M150 Gas Reactor Column (GRC) is a hot bed reactor designed to abate semiconductor exhaust gases in a sub-production level environment, such as a University Lab. Like other non-hybrid abatement systems, the GRC can be configured to treat gases from a limited range of processes. The most common application for a GRC is metal etch (acid) abatement, however it can also be configured for Implant, LPCVD and other applications by utilizing different cartridges and altering other internal componentry.
The M150 is a single inlet/single cartridge system, requiring 3 Phase voltage to power its cartridge heaters, valves and control system. It is typically integrated into the parent tool or chamber’s control system such that unit’s status (on or offline) is known to the equipment operator.
Trillium provides end users with refurbished M150 GRCs, repairs and on-site service to improve system reliability and uptime.
Specifications for US Version systems are below. D150 specifications included for reference.
|System||# of Cartridges/Heaters||Voltage||Heater Power||Max Flow Rates|
|M150S||1||200-230V 3 Ph||5.7 kW||60 LPM|
|D150S||2||200-230V 3 Ph||5.7 kW||60 LPM|