Refurbished Ebara ESA25D Dry Pumps
This ESA25 is a Multi Stage Dry Pump part of the second generation of dry pumping solutions introduced by Ebara. It has a compact design and includes various sensors and controls reporting to the handheld LCD display or to a parent vacuum chamber to enhance the operation. It utilizes a water cooled canned motor driving multi stage tri-lobe roots pumping technology. Due to its hot running design and high pumping speed, it is a popular choice for MOCVD reactors.
|Pumping Speed||Ultimate Pressure||Motor Power||Inlet||Exhaust|
|106 CFM||30 mTorr||3.7 kW||NW40||NW40|