Refurbished Vector Ultra Si Wet Scrubber
The Vector Ultra Si is a wet scrubber type abatement system originally produced by Ecosys, who were subsequently acquired (in chronological order) by ATMI, Metron and Applied Materials.
The Vector Ultra Si s designed specifically for CVD applications and can be configured with 1-4 inlets. The Vector Ultra Si features a special inlet entry to prevent concerns such as clogging and corrosion.
Trillium provides end users with refurbished Vector Ultra Sis, spare parts and on-site service to improve system reliability and uptime.
Specifications for the Vector Ultra Si are below.
|Inlets||Voltage||Dimensions (WDH)||Max Flow Rates|
|1-4||200-230V 3 Ph||27″ x 36.3″ x 84″||250 SLM|