Refurbished Airgard Cyclone Wet Scrubber
The Airgard Cyclone is a wet scrubber type abatement system popular for its reliability in abating semiconductor Etch and Epitaxy applications.
The Cyclone can be configured with 1-4 inlets, with the inlet’s type being specific for different applications to handle concerns such as clogging and corrosion.
Trillium provides end users with refurbished Airgard Cyclones and on-site service to improve system reliability and uptime.
Specifications for the Airgard Cyclone are below.
|Inlets||Voltage||Dimensions (WDH)||Max Flow Rates|
|1-4||Multiple Options||25″ x 35″ x 84″||600 SLM|