Refurbished Alcatel ADS602 Dry Pumps
The Alcatel ADS Series 2 Dry Pumping Systems are a multi-stage roots design, consisting of a base dry pump (ADP1222) with 5 progressively smaller compression stages and a mechanical booster. Alcatel offered the ADS602 in several varieties including L, LM, P and H types. The “L” variant provides no purge and has limited control features – it is a basic dry pump for light duty applications such as load locks and transfer chamber. The “LM”, “P, and “H” varieties were designed for Medium duty (e.g. light etch), Process duty (e.g. metal etch, CVD), and Harsh Duty (e.g. ALD) applications respectively and each has its own type of optimized Nitrogen purge arrangement. These more capable varieties also feature sophisticated sensors and a handheld display to ensure the user is aware of the pump’s status and health. These pumps also featured a standard set of outputs to be used in interfacing the pump to a parent vacuum chamber.
|Pumping Speed||Ultimate Pressure||Motor Power||Inlet||Exhaust|
|329 CFM||1 mTorr||3 kW||ISO100||NW40|