Trillium Products

Primary Pumps



Gas Abatement


What We Do at Trillium

Trillium specializes in helping customers using vacuum systems and related products in a wide range of industries. We offer new and refurbished products, as well as repair services supporting dry pumps, oil-sealed pumps, blowers, cryogenic pumps, cold heads, helium compressors, chillers and gas abatement systems. We provide service on-site or from one of our 3 manufacturing and repair centers in the USA and Trillium’s management systems are registered to the ISO9001:2015 standard.

Our Services

Repair Service, Exchange, and Field Service

Recent News

Trillium Acquires Austin Scientific

AUSTIN, Nov. 23, 2015 Trillium US Inc, headquartered in Clackamas, OR, has announced the acquisition of the Oxford Instruments-Austin division, formerly known as Austin Scientific, effective November 23rd, 2015.

Choosing a Rough Pump – Semi – Part 1

Choosing a rough vacuum pump for a new vacuum chamber can sometimes be challenging. Chamber suppliers sometimes provide the rough pump by default as part of their scope of supply: How might their choice impact you as the end user?

Top 10 reasons to purchase a refurbished Edwards abatement system