Vacuum Systems

Products
- - Product Highlight
  - - Dry Pumps
      
      New Trillium TDS800Xi
      
      Trillium’s series of new Dry Screw Pumps is an excellent choice for vacuum drying, environmental test, vacuum coating and other high vacuum applications.
      Learn More
- - - Product Categories
      - Close
    - Dry Pumps
      - Refurbished Edwards Dry Pumps
        QDP40
        QDP40/250
        QDP40/500
        QDP80
        QDP80/250
        QDP80/500
        QDP80/1200
        iQDP40
        iQDP40/250
        iQDP40/500
        iQDP80
        iQDP80/250
        iQDP80/500
        iQDP80/1200
        QMB250 Booster
        QMB500 Booster
        QMB1200 Booster
        More Refurbished Edwards Pumps
        iL70
        iL600
        iH80
        iH600
        iH1000
        iH1800
        iGX100
        iGX600
        EPX180
        EPX500
        XDS5 Scroll
        XDS10 Scroll
        XDS35i Scroll
      - Refurbished Ebara Dry Pumps
        40×20
        50×20
        80×25
        A10S
        A25S
        A30W
        A70W
        A150W
        ESA25D
        ESA70-W
        ESA80-W
      - New Trillium TDS Dry Pumps
        TDS150Xi
        TDS300Xi
        TDS400Xi
        TDS800Xi
      - Refurbished Alcatel Dry Pumps
        ADP122
        ADS602
        A100L
      - Close
    - Cryogenics
      - New CryoPlex Cryo Pumps
        CP8
        CP8LP
        CP10
        CP16
        Cryogenic ColdHead
        Cryogenic Water Pumps
      - Refurbished CTI CryoPumps
        CryoTorr 8
        CryoTorr 8F
        CryoTorr 10
        CryoTorr 250F
        CryoTorr 400
        CryoTorr 500
        OnBoard 8
        OnBoard 8F
        OnBoard 10
        OnBoard 250F
        OnBoard 400
        OnBoard 500
        OnBoard IS 8F
        OnBoard IS 250F/E
        OnBoard IS 320F/E
      - New M Series Cryo Compressors
        M250
        M350
        M600
        M700
      - Refurbished CTI Cryo Compressors
        1020R
        8200
        8500
        8510
        9600
        9700
      - Cryo Accessories
        Adsorbers
        Cryo Arrays & Radiation Shields
        Temperature Monitors/Controllers
      - Close
    - Chillers
      - Refurbished Neslab Chillers
        HX75
        HX150
        HX300
        HX500
        HX750
        CFT33
        CFT75
        CFT150
        CFT300
        Merlin M33
        Merlin M75
        Merlin M150
      - Refurbished Thermoflex Chillers
        1400
        2500
        3500
        5000
        10000
      - New Trillium Chillers
        TCU 40/80
        TCU 40/80 Plus
      - Refurbished M&W Chillers
        Single Channel
        Dual Channel
      - Solid State Cooling Systems
        Thermorack 1201
        Nikola 3K and 5K
      - Refurbished Lam Chillers
        20/80
      - Neslab Heat Exchangers
        Steelhead 0
        Steelhead 1
        System I
        System II
        System III
        System IV
      - Close
    - Abatement
      - Refurbished Dry Scrubbers
        NovaPure
        Edwards M150 GRC
        Edwards D150 GRC
      - Refurbished Wet Scrubbers
        Vector Ultra 3000
        Vector Ultra 3500
        Vector Ultra 5000
        Vector Ultra Si
        Airgard Cyclone
      - Refurbished Combustion Scrubbers
        Guardian GS8 Scrubbers
        Guardian GS4 Scrubbers
      - Refurbished Hybrid Scrubbers
        Edwards TPU
        Edwards TCS
        Edwards Helios
        Edwards Kronis
        ATMI/Ecosys CDO
      - Parts and Service
        H2O Recirc Pump Refurb Service
        WRU Replacement Pump
      - Close
    - Rotary Piston Pumps
      - New Univac Rotary Piston Pumps
        100 Series
        200 Series
        400 Series
      - Refurbished Stokes Rotary Piston Pumps
        148H
        149H
        212H
        212J
        412H
        412J-14
      - Refurbished Leybold Rotary Piston Pumps
        DK200
        E250
      - Refurbished Kinney Rotary Piston Pumps
        KC-15
      - Close
    - Mechanical Blowers
      - New Univac Booster Pumps
        300
        600
        600-07
        600-BP
        600-22
      - Refurbished Leybold Booster Pumps
        WA/WAU251
        WA/WAU501
        WA/WAU1001
        WA/WAU2001
        WS/WSU251
        WS/WSU501
        WS/WSU1001
        WS/WSU2001
      - Refurbished Edwards Booster Pumps
        EH-250
        EH-500
        EH-1200
        EH-2600
        EH-4200
      - Refurbished Alcatel Booster Pumps
        RSV 301
        RSV 601
      - Refurbished Stokes Booster Pumps
        306
        310
        607
        615
        615 BP
        622
      - Refurbished Kinney Booster Pumps
        KMBD-1600
        KMBD-2000
      - Close
    - Large Pumping Packages
      - New Univac Packages
        100MBX
        200MB
        200MBX
        400MB
        400MBX
        1700-21
        1700-22
      - Refurbished Stokes Packages
        148MBX
        149MB
        149MBX
        212MB
        212MBX
        412MB
        412MBX
        612MB
        1721
        1722
      - Close
    - Rotary Vane Pumps
      - Refurbished Leybold Rotary Vane Pumps
        Trivac D30A and D30AC
        Trivac D60A and D60AC
        Trivac D90A and D90AC
        Trivac D8B and D8BCS
        Trivac D16B and D16BCS
        Trivac D25B and D25BCS
        Trivac D40B and D40BCS
        Trivac D65B and D65BCS
        Sogevac SV65
        Sogevac SV100
        Sogevac SV200
        Sogevac SV300
        Sogevac SV630
      - Refurbished Edwards Rotary Vane Pumps
        E2M18
        E2M28
        E2M30
        E2M40
        E2M80
        E2M275
      - Refurbished Alcatel Rotary Vane Pumps
        Pascal 2021
        Pascal 2033
        Pascal 2063
      - Refurbished Busch Rotary Vane Pumps
        RA/RC063
        RA/RC100
        RA/RC160
        RA/RC250
      - Refurbished Welch Rotary Vane Pumps
        1376
        1397
        1402
      - Close
- Close
Services
Industries
Technical/Support
About Us

Terms and Conditions

Terms and Conditions

Terms and Conditions

The Trillium terms and conditions are provided below for your reference.

Trillium Terms and Conditions

Our Services

Repair Service, Exchange, and Field Service

Dry Pump Repair

Oil Sealed Pump Repair

Cryo Pump Repair

Helium Compressor Repair

Chiller Repair

About Trillium US

Trillium specializes in helping customers using vacuum, closed loop helium, temperature control and gas abatement systems.

Quick Links

Terms and Conditions

Technical Documents

Part of Atlas Copco Group

© 2026 Trillium US. All rights reserved. | privacy policy | sitemap