Pumping Systems for Flat Panel and Solar Manufacturing
Trillium has the largest inventory of previously used flat panel and solar dry pumping systems. These pumps are ideal for the rapid pump down of large load lock chambers and feature some of most recent pumping technology available.
|Make||Model||Pumping Speed||Ultimate Pressure||Motor Power|
|Edwards||iF1800||1800 m3/h||1 x 10-2 Torr||7 kW at 460V|
|Edwards||iF30K||2100 m3/h||1 x 10-2 Torr||18kW at 460V|
|Alcatel||ADK70||3270 m3/h||1 x 10-2 Torr||20.5kW at 460V|