Looking to modernize your compressor fleet, reduce energy or increase reliability? Trillium’s M600 is ideally suited to achieve these goals, especially for Semiconductor Fab end users. The M600 replaces multiple 9600s on AMAT Endura ® PVD systems – run (2) M600s instead of (3) 9600s. The same is true for Ion Implanters – the M600 replaces many multiple cryo/compressor configurations with a single unit as it can more effectively drive systems with (1) 8” and (1) 10” cryo. Contact us for more details:
M600 Cryo Compressor
- Replace multiple legacy compressors with a single unit
- Drive up to four 8″ cryos or up to two 10″ cryos
- Available in Air or Water cooled configurations
- 200-230V 3Ph or 380-480V 3Ph voltages
- Powers either 2 Phase or 3 Phase cryos and coldheads
- Compatible with standard and OnBoard® Cryo pumps
