Trillium takes pride in the personal approach to customer service and support. Dedicated professionals, based in our world-class manufacturing and repair facilities provide comprehensive repair services, technical support and Customer Service to ensure the high performance, reliability and uptime required by critical cryogenic vacuum applications.
Cryopump Service Scope of Work:
Vacuum Side:
- Complete Disassembly and Ultrasonic Cleaning
- Replace: 15K condensing array (charcoal array), silicon diode (if equipped), indium gaskets, o-rings
- Inspect and Test:* 80K condensing array (inlet array), radiation shield, hydrogen vapor gauge (if equipped)
Helium Side:
- Replace: First and second stage displacer Seals, motor bearings, upper/lower bushings and exhaust valve body
- Inspect and Test:* Scotch yoke, valve stems, rocker arms, crankshaft, displacers and helium PRV
- Set valve timing, remagnetize motor and test inlet valve
