Refurbished Hybrid Scrubbers
Hybrid scrubbers combine the destructive power of a combustion system with the acid handling capability of a wet scrubber. Therefore, they require the user to provide both a combustion source (electricity or fuel) and an acid waste water drain/treatment solution. Due to this, hybrid scrubbers are well suited for large volume manufacturing where the cost of establishing these facilities can be amortized over a larger amount of equipment. In addition, hybrid scrubbers with multiple inlets allow the user to abate several different exhaust streams with a single unit.
Trillium can supply the following hybrid scrubbers:
|Make||Model||Fuel Type||Typical Applications||PFC Abatement||Inlets||Max Flow Rates|
|Edwards||Helios||CH4||Epi (H2)||No||1-4||220 SLM|
|Edwards||TPU||CH4 & O2||Etch/CVD||Yes||1-4||600 SLM|