Refurbished Wet Scrubbers
Wet scrubbing is the most common type of exhaust abatement in the electronics industry. Most house exhaust systems are plumbed to a large central wet scrubber to treat general exhaust. However, many applications produce a very corrosive by-product (e.g., Hydrochloric Acid) that can wreak havoc on exhaust systems if allowed to travel untreated from pump exhaust through the ducting to the general wet scrubber. In these instances, a point of use (POU) wet or hybrid scrubber may be required to prevent exhaust system damage. Keep in mind, wet scrubbers alone are not effective in treating greenhouse gases.
Trillium can supply the following wet scrubbers:
|Make||Model||Typical Applications||Inlets||Max Flow Rates|
|ATMI/Ecosys||Vector Ultra 3000||Metal Etch||1-4||250 SLM/Inlet|
|ATMI/Ecosys||Vector Ultra 3500||Metal Etch||1-4||250 SLM/Inlet|
|ATMI/Ecosys||Vector Ultra 5000||Silicon Nitride||1-4||250 SLM/Inlet|
|ATMI/Ecosys||Vector Ultra Si||Silicon Nitride||1-4||250 SLM/Inlet|