CTI Helium Compressors
CTI OnBoard Cryopumps are the most popular semiconductor cryo pumps on the market. Several key features lend themselves to chip manufacturing. OnBoard pumps feature more automated regeneration functions, including the FastRegen, which along with the Full Regen feature utilizes an integrated heater within the cold head in order to speed the pump’s return to higher regeneration temperatures. The heater is also used to provide precise temperature control of the coldhead. OnBoard pumps also include an electronic module built in to the cryopump which controls the operation of the cryopump, allows the user to fully configure the pump for its purpose, and allows easy integration with a wide variety of parent equipment.
|Model||8″ Cryo Capacity (Qty)||10″ Cryo Capacity (Qty)||Air/H2O Cooled Variant||Phase Options||Power Options (Volts)|
|SC||1||0||Air Only||1 Ph.||208-230|
|1020R||3||1||Air/H2O||1 & 3 Ph.||208-230 / 380-460|
|8200||1||0||Air/H2O||1 & 3 Ph.||208-230|
|8500||3||1||H2O||3 Ph.||208-230 / 460|
|8510||3||1||H2O||3 Ph.||208-230 / 460|
|9600||3||1||H2O||3 Ph.||208-230 / 380-415|
Selecting a Cryo Pump
When choosing a cryo pump, select a model that produces the appropriate pumping speed for the gases used in your process. Secondly, ensure your system can physically accomodate the size of pump you need. As a rule of thumb the model indicates the diameter of the cryo pump vessel (e.g. CT8 = 8 inches, CT250F = 250mm). Thirdly, ensure the cryo compressor you have or are considering is sufficiently sized to handle the number and size of cryo pumps.