Refurbished Lam Chillers
The LAM TCU 20/80 chiller is a dual channel temperature control unit, used predominantly on the LAM 4000 Etchers Series. The 20/80 was designed to provide independent temperature control to the process chamber’s upper and lower electrodes all from a single chiller using a mix of DI water and Glycol.
Trillium provides both service and refurbished 20/80s in support of customers globally. With access to OEM parts direct from LAM, Trillum can provide expert level support on your existing 20/80 fleet.
|TCU 20/80 Channel||Temp Range||Flow Rate at 20C/60psi||Cooling at -15C (watts)||Cooling at -20C||Reservoir Capacity|
|Upper||+15C to +80 C||4GPM||750||1000||5 Gallons|
|Lower||-20C to +80C||4GPM||N/A||1000||5 Gallons|