Many customers continue to rely on oil-sealed rotary vane pumps for many applications. They often struggle with issues related to vacuum oil, including oil leaks, dealing with used oil after oil changes, and oil back-streaming issues that impact their production process. Trillium US Inc. offers some low cost dry pump upgrades that are perfect for customers who want to eliminate the problems mentioned above but don’t want to spend $15-$30K for a new dry pumping system. If you would be interested in upgrading, and you have 3 phase power and process cooling water available at your facility, please reach out to us for more information.[Read more…]
Trillium provides semiconductor end users with Refurbished Edwards Point-of-Use Abatement Systems to treat process exhaust gases on CVD, Etch and EPI applications. These systems are fully refurbished, including complete disassembly and decontamination, followed by consumable and major assembly rebuild or replacement. Each unit is fully tested by one of our abatement experts and then properly crated for shipment. We offer on-site commissioning and training to ensure your tool or chamber install goes smoothly and you are equipped to operate and maintain your new system for years to come. Contact us for more information:[Read more…]
Ebara ESA series dry pumps are the workhorses for most MOCVD reactors, maintaining vacuum in the face of high hydride gas flows. Trillium provides refurbished ESA pumps as well as overhaul service for these units including full strip down, decontamination and rebuild/testing using new consumables, as well as new machined parts when required. If you need additional pumps or pump service, contact us at for more information.[Read more…]
Today’s vacuum trivia: Edwards manufactured approximately 140,000 iQDP80 and iQDP40 based systems over the years. Roughly 70,000 are still in service and they remain the workhorses of 200mm semiconductor factories.
While many rebuilders can perform a mechanical repair on these pumps, Trillium has developed a unique capability to also service the electronic subsystems as illustrated below. If you are in need of a COMPLETE repair of an iQDP based system or simply need one of your modules fixed, please contact us.[Read more…]
Are you limiting the gases used on your Etch or Deposition system due to the high cost of installing a gas abatement system? Do you have a process that is fouling your exhaust lines because you think a point of use abatement system is unaffordable? If so – NovaSafe is for you. Watch the video and contact us so we can confirm NovaSafe is the right solution for you.[Read more…]