Refurbished QDP Series Dry Pumps
Description:
The Edwards QDP Series Dry Pumps are an excellent choice for primary pumping requirements in a wide range of applications. Their low capital and repair cost, ease of operation and interfaceability with a wide range of process tools make them the preferred choice for upgrading rotary vane pumping systems.
QDP pumps feature a teflon coated hook and claw pumping mechanism, a quiet water cooled motor and up to 50SLM of nitrogen purging for the harshest applications.
| Model | Pumping Speed | Ultimate Pressure | Motor Power |
|---|---|---|---|
| QDP40 | 30 CFM | 23 mTorr | 2.2 kW |
| QDP40/QMB250 | 171 CFM | 5 mTorr | 4.4 kW |
| QDP40/QMB500 | 251 CFM | 5 mTorr | 4.4 kW |
| QDP80 | 56 CFM | 7.5 mTorr | 4 kW |
| QDP80/QMB250 | 180 CFM | 5 mTorr | 6.4 kW |
| QDP80/QMB500 | 272 CFM | 5 mTorr | 6.4 kW |
| QDP80/QMB1200 | 554 CFM | 5 mTorr | 8 kW |
Refurbished iQDP Series Dry Pumps
Description:
The Edwards iQDP Series Dry Pumps use a nearly identical pumping mechanism as the QDP series (read above), plus they feature an integrated electronics and control suite enabling the user to easily monitor and report a wide range of pump health outputs and detect issues automatically. When integrated with a Tool Interface Module, an iQDP pumping system communicates easily with any process tool. Like the QDP series, the iQDP pump can be diluted with up to 50SLM of nitrogen purge for harsh applications.
| Model | Pumping Speed | Ultimate Pressure | Motor Power |
|---|---|---|---|
| iQDP40 | 30 CFM | 23 mTorr | 2.2 kW |
| iQDP40/QMB250 | 171 CFM | 5 mTorr | 4.4 kW |
| iQDP40/QMB500 | 251 CFM | 5 mTorr | 4.4 kW |
| iQDP80 | 56 CFM | 7.5 mTorr | 4 kW |
| iQDP80/QMB250 | 180 CFM | 5 mTorr | 6.4 kW |
| iQDP80/QMB500 | 272 CFM | 5 mTorr | 6.4 kW |
| iQDP80/QMB1200 | 554 CFM | 5 mTorr | 8 kW |
Refurbished iH and iL Series Dry Pumps
Description:
The Edwards iH and iL Series Dry Pumps were introduced as the follow-on to the iQDP dry pumping systems. This next generation of pumps from Edwards (also hooks and claw design) are ideally suited for applications that benefit from higher operating temperatures. While running near 120 degree Celsius, process gases which would ordinarly condense inside a cooler pump will pass through freely, preventing the pump from seizing due to particulate accumulation.
Like the iQDP pumps, the iH series can be easily interfaced to process tools and have similar N2 purging systems as well. The iL series features the ability to operate the pump without purge to conserve N2 and thus are suited best for benign applications.
| Model | Pumping Speed | Ultimate Pressure | Motor Power |
|---|---|---|---|
| iL70(N) | 49 CFM | 23 mTorr | 2.2 kW |
| iL600(N) | 353 CFM | 1 mTorr | 4.4 kW |
| >iH80 | 61 CFM | 7.5 mTorr | 3.5 kW |
| iH600 | 353 CFM | 1 mTorr | 6.1 kW |
| iH35SE | 224 CFM | 1 mTorr | 6.1 kW |
| iH1000 | 589 CFM | 1 mTorr | 6.1 kW |
| iH1800 | 1060 CFM | 7 mTorr | 8 kW |
Refurbished iGX Series Dry Pumps
Description:
The Edwards iGx Series Dry Pumps were introduced as a complementary product to the iH series and essentially replace the iL series pumps. Like the iL, the iGx series pumps are best equipped for light to medium duty applications and are offered in 3 basic ranges: L – no N2 purge, N – includes N2 purge, and M – N2 purge and exhaust pressure monitoring. A more compact design saves precious factory or lab space and their integrated idle mode allows them to wind down to only consume 50 watts of power when full performance is not needed, typically between process cycles.
| Model | Pumping Speed | Ultimate Pressure | Motor Power |
|---|---|---|---|
| iGx100L | |||
| iGx100N | 353 CFM | 4 mTorr | 1 kW |
| iGx100M | |||
| iGx600L | |||
| iGx600N | 365 CFM | 1 mTorr | 1.6 kW |
| iGx600N |
