Refurbished Dry Scrubbers
Description:
Point of use dry scrubbers, also referred to as “passive scrubbers” and “hot bed reactors” are very commonly used where it is less feasible to employ a wet scrubber, such as if the facility cannot economically handle acid water waste. Unlike a wet scrubber, which continually consumes fresh water regardless of how much process gasses are flown, a dry scrubber consumes a typically solid material only when process gasses flow. Time between replacement of the solid is directly correlated to how much process gas is used and most systems of this kind use either a disposable cartridge/cannister or a refillable media bed. These scrubbers are ideal for small volume manufacturing where concern exists regarding exhaust duct damage and emissions, but where there is not a requirement to effectively remove greenhouse gases.
Trillium can supply the following dry scrubbers:
Make | Model | Typical Applications | Inlets | Max Flow Rates |
---|---|---|---|---|
Edwards | M150 | Etch/Implant | 1 | 60 SLM |
Edwards | D150 | Etch/Implant | 1 | 60 SLM |
Edwards | iGRC | Etch/Implant | 1 | 60 SLM |
Edwards | i250 | Etch/Implant | 1 | 60 SLM |