ATLAS Water Recirculation Pump Refurbishment Service
Description:
Trillium takes pride in the personal approach to customer service and support. Dedicated professionals, based in our world class manufacturing and repair facilities provide comprehensive repair services, technical support and customer service to ensure the high performance, reliability and uptime required by critical cryogenic vacuum applications. Trillium provides refurbishment service for the Edwards ATLAS water recirculation pump. This service offers gas abatement end users a significant cost savings versus replacing the pump with new.
Models Serviced:
- ATLAS Etch
- ATLAS TPU
- ATLAS TCS
- ATLAS Kronis
- ATLAS Helios
Service Scope of Work:
Once received, the pump is disassembled, cleaned and inspected. All consumables are replaced during every refurbishment, and if needed, non-consumable parts are replaced as well.
Commitment to Quality:
- Repaired to Meet or Exceed OEM Specifications
- Electrical Safety Check
- Leak Check
- Load Current
- Flow Testing at Multiple Pressures
- Maximum Flow and Pressure Verification
- Certificate of Conformance Supplied
- Full One Year Global Warranty**
