Today’s vacuum trivia: Edwards manufactured approximately 140,000 iQDP80 and iQDP40 based systems over the years. Roughly 70,000 are still in service and they remain the workhorses of 200mm semiconductor factories.
While many rebuilders can perform a mechanical repair on these pumps, Trillium has developed a unique capability to also service the electronic subsystems as illustrated below. If you are in need of a COMPLETE repair of an iQDP based system or simply need one of your modules fixed, please contact us.
Dry pump repair procedure:
- Evaluate performance with automated diagnostics
- Identify errors and faults
- Perform repairs as necessary, including board level repair
- Validate repairs on slave unit and test apparatus
