Refurbished Hybrid Scrubbers
Description:
Hybrid scrubbers combine the destructive power of a combustion system with the acid handling capability of a wet scrubber. Therefore, they require the user to provide both a combustion source (electricity or fuel) and an acid waste water drain/treatment solution. Due to this, hybrid scrubbers are well suited for large volume manufacturing where the cost of establishing these facilities can be amortized over a larger amount of equipment. In addition, hybrid scrubbers with multiple inlets allow the user to abate several different exhaust streams with a single unit.
Trillium can supply the following hybrid scrubbers:
| Make | Model | Fuel Type | Typical Applications | PFC Abatement | Inlets | Max Flow Rates |
|---|---|---|---|---|---|---|
| ATMI/Ecosys | CDO | None | Etch/CVD | No | 1-4 | 110 SLM |
| Edwards | Helios | CH4 | Epi (H2) | No | 1-4 | 220 SLM |
| Edwards | TCS | CH4 | Etch/CVD | No | 1-4 | 180 SLM |
| Edwards | TPU | CH4 & O2 | Etch/CVD | Yes | 1-4 | 600 SLM |
