Refurbished Airgard Cyclone Wet Scrubber
Description:
The Airgard Cyclone is a wet scrubber type abatement system popular for its reliability in abating semiconductor Etch and Epitaxy applications.
The Cyclone can be configured with 1-4 inlets, with the inlet’s type being specific for different applications to handle concerns such as clogging and corrosion.
Trillium provides end users with refurbished Airgard Cyclones and on-site service to improve system reliability and uptime.
Specifications for the Airgard Cyclone are below.
| Inlets | Voltage | Dimensions (WDH) | Max Flow Rates |
|---|---|---|---|
| 1-4 | Multiple Options | 25″ x 35″ x 84″ | 600 SLM |
