Trillium 40/80 TCU Chillers
Trillium acquired the TCU 40/80 Product Line from Edwards Vacuum in early 2009. Trillium currently provides service, parts, and new or refurbished TCU 40/80s in support of End User worldwide. Please contact Trillium for any support issues on your TCU 40/80 chillers.
The TCU 40/80 is manufactured in both Standard and Plus variants and is primarily used with Semiconductor Etch chambers to control wafer chuck, cathode, anode, and chamber wall temperatures. The 40/80 was also designed to replace other dual channel chillers like the LAM 2080, and as such one 40/80 can be stacked directly on top of another unit or they can be configured vertically using a stacking frame. TCU 40/80s are designed specifically to use flourinated fluids only. Feel free to contact Trillium for any specific questions regarding your application.
|Model||Temp. Range||Flow Rate at 20C/60psi||Cooling Capacity -40C (Watts)||Cooling Capacity -20C to 80C||Power Consumption|
|TCU 40/80||-40C to +80C||3 GPM||750||2000||4.5 kW|
|TCU 40/80 Plus||-40C to +80C||3 GPM||750||2400||4.5 kW|