Cryopump Arrays and Radiation Shields
Description:
As a trap type vacuum pump, cryopumps utilize two methods to isolate gas molecules, preventing them from returning to your vacuum chamber. Since cryopumps operate at temperatures of around 10 Kelvin at their coldest points, they are able to condense or freeze certain molecules on the cold surfaces of the 15 Kelvin and 80 Kelvin arrays. Some molecules, however, freeze at much lower temperatures and therefore must be isolated using a different method. In a cryopump this is achieved with charcoal – gases make their way into the tiny crevices of the charcoal and are essentially trapped as they are unable to escape.
Scheduled replacement of the condensing array, as well as radiation shield, ensures maximum operating performance and pumping capacity of your cryopump. In all applications, the 15K array charcoal has a finite capacity for gas. Once capacity is reached, the user will experience deteriorating pumping speed. As well, 80K arrays and radiation shields often become damaged and ineffective on corrosive processes – such as Ion Implantation.
Trillium offers replacement condensing arrays and shields for both our CryoPlex series as well for CTI CryoTorr® and OnBoard® cryopumps. Our replacement array kits include a gasket set, fasteners, tool, gloves, o-ring and instructions – everything you need to do the job.
Click on part number to purchase online
| Applicable Products | 15 K Array | 80 K Array | Radiation Shield | ||||
|---|---|---|---|---|---|---|---|
| Trillium | CTI | Trillium PN | CTI PN | Trillium PN | CTI PN | Trillium PN | CTI PN |
| Cryoplex® 8 | CryoTorr® 8 / 8 OnBoard® | 15KCA-8 | 8080002K010 | 99-00018-008 | 8080002K001 | 99-00022-008 | |
| Cryo-Plex® 8LP | Cryo-Torr® 8F | 15KCA-8F | 8080007K010 | 99-00018-008 | 8080007K001 | 80KRS-8F | |
| 8F OnBoard® | 15KCA-OB8F | 8080011K005 | 99-00018-008 | 8080011K006 | 80KRS-8F | ||
| 8F OnBoard® Enhanced | 99-00044-000 | 8080011K011 | 99-00018-08E | 80KRS-8F | 8080011K007 | ||
| Cryo-Plex® 10 | Cryo-Torr® 10/10 OnBoard® | 15KCA-10 | 8080007K010 | 99-00018-010 | 8080003K001 | 80KRS-10 | 8080003K004 |
| Cryo-Plex® 16 | Cryo-Torr® 400/400 OnBoard® | See Below* | See Below* | 99-00018-016 | 8080004K001 | 99-00022-016 | 8080004K004 |
| Cryo-Torr® 100 | 15KCA-100 | N/A | 99-00018-100 | 8080002K001 | 99-00022-100 | 808002K004 | |
* Cryo-Plex® 16, CryoTorr® 400 and 400 OnBoard® Pumps have a 2 piece 15 K Array consisting of:
| Description | Trillium PN | CTI PN |
|---|---|---|
| 15K Condensing Array | 15KCA-400 | 8080004K003 |
| 15K Absorbing Array | 15KCAA-400 | 8080004K002 |
