Refurbished CTI OnBoard 250F Cryo Pump
The CTI OnBoard 250F series of cryo are used primarily in the Semiconductor Ion Implant application and its primary configuration includes an ISO flange. The OnBoard 250F includes built in functionality for:
- Interfacing to a process tool directly or through a network controller
- Faster regeneration and precise 1st and 2nd stage temperature using the integrated cold head heater
- Remote regeneration by a process tool or via keypad
- Simultaneous regeneration with multiple other cryopumps in the same system
- Local access to cryo system health via the keypad or PC via RS232
Trillium provides world-class support for your OnBoard 250F including technical support, expert repair service, as well as a full range of spare parts and repair kits for every repair approach.
OnBoard 250F offers the following performance. Included is the performance of the smaller and larger sizes available for comparison.
| Pumping Speed (l/s) | |||||
|---|---|---|---|---|---|
| Model | H2O | Air | H2 | Ar | Cooldown (Minutes) |
| OnBoard 8 | 4000 | 1500 | 2500 | 1200 | 90 |
| OnBoard 10 | 6500 | 2200 | 3200 | 1800 | 120 |
| OnBoard 10 | 9000 | 3000 | 5000 | 2500 | 100 |
Trillium stocks a wide range of refurbished OnBoard 250Fs for immediate exchange or outright purchase. The most popular models include the following, ask for these by PN when requesting a quote:
| CTI PN | Flange | Array Type | Motor Type |
|---|---|---|---|
| 8116028G001 | ISO | Standard | 2 Phase |
| 8116185G001 | ISO | Standard | 2 Phase |
| 8116210G001 | ISO | Standard | 2 Phase |
