New Trillium Water Pumps
Significantly Improve Vacuum Pressure with No Impact on Existing Configuration
Trillium cryogenic water pumps significantly improve water vapor pumping capability and reduce vacuum pump down time with no interference to the existing chamber equipment and performance. Water pumps are a cost effective way of upgrading existing vacuum chambers equipped with cryopumps, turbo-molecular or diffusion pumps. Trillium water pumps use time tested cryogenic cold head designs on a number of cryo panel configurations providing standard and custom water pumping solutions.
Key Features & Benefits
- Flexible Configuration: Two configurations are available to maximize the integration into your existing cryogenic vacuum pumping applications. In-Situ Cryogenic Water Pumps are designed to be integrated into your existing pumping applications. In-Line / Appendage Cryogenic Water Pumps are utilized to take advantage of a cryogenic water pump without significant changes to existing applications and equipment setup.
- In-Line Cryogenic Water Pump: When a vacuum chamber has no spare port to mount a cryogenic water pump independently, the In-Line Cryogenic Water Pump configuration can be used to take advantage of the benefit of a cryogenic water pump without significant change to the existing chamber equipment design, setup, and performance. This configuration will allow adding significant water vapor pumping capability to the chamber without affecting the pumping speed of the existing cryopump, turbo-molecular pump (TMP) or diffusion pump (DP).
- Largest Available Surface Area and Highest Pump Speed: In the In-Situ Cryogenic Water Pump configuration, the cryo panel or water sail of the pump is located inside the vacuum chamber itself with the cryogenic cold head and drive motor mounted on a vacuum chamber port. The main advantage of this configuration is the cryo panel / sail can be custom designed to fit the internal geometry of the chamber. By conforming to the surface area of the chamber, the cryo panel achieves the largest available surface area and overall pumping speed. This configuration has no impact on the pumping speeds of other process gases if the pump is mounted on its own port.
| In-Line Pumping Speed | 4″ | 6″ | 8″ | 10″ | 16″ |
|---|---|---|---|---|---|
| Water pumping speed l/s | 1100 | 2500 | 4000 | 7000 | 16000 |
| Conductance (N2, in-line) | 450 | 1000 | 1800 | 2800 | 7800 |
| Compressor compatibility (minimum size) | M250 | M250 | M250 | M350 | M600 |
