Refurbished Ebara 80×25 Dry Pumps
Description:
The Ebara 80×25 is part of Ebara’s UERR series of multi-stage roots dry pumps. Although fairly crude by today’s standards, the 80×25 consist of both a dry pump and booster featuring a water cooled canned motor driving tri lobe roots rotors. The 80×25 was offered in (3) main varieties, one with either 3” or 5” inter-stage coolers designed to force deposition of byproduct outside the swept volume for dirty process. The third without coolers (sometimes called the manifold version) that was ideal for light duty applications such as load locks and transfer chambers, however it was commonly used on other applications including PECVD. To aid with more difficult processes, both varieties features extensive Nitrogen purging systems designed to both enable the integral labyrinth oil seal design, but to also provide inert dilution of process gases.
UERR Series pumps were often fitted with control boxes designed to both operate and monitor the pump, but also to interface the pump to a process tool.
| Pumping Speed | Ultimate Pressure | Motor Power | Inlet | Exhaust |
|---|---|---|---|---|
| 297 CFM | 4 mTorr | 8.4 kW | NW40 | ISO100 |
