Refurbished Ebara A25S Dry Pumps
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Description:
This A25S is a Multi Stage Dry Pump part of the second generation of dry pumping solutions introduced by Ebara. It has a compact design and includes various sensors and controls reporting to the handheld LCD display or to a parent vacuum chamber to enhance the operation. It utilizes a water cooled canned motor driving multi stage tri-lobe roots pumping technology. Due to its hot running design and high pumping speed, it is a popular choice for MOCVD reactors.
Pumping Speed | Ultimate Pressure | Motor Power | Inlet | Exhaust |
---|---|---|---|---|
106 CFM | 30 mTorr | 3.7 kW | NW40 | NW40 |