Refurbished Ebara ESA70-W Dry Pumps
Description:
This ESA70-W is a compound Multi Stage Dry Pump based on the same mechanical design as the A70W. The unit has been repackaged in a new chassis and enclosures, and has upgraded electronics as compared to the A Series version. The ESA70W features a dry pump and blower both with water cooled canned motors driving tri-lobe roots pumping technology. Due to its hot running design and high pumping speed, it is a popular choice for MOCVD reactors.
| Pumping Speed | Ultimate Pressure | Motor Power | Inlet | Exhaust |
|---|---|---|---|---|
| 300 CFM | 1 mTorr | 5.9 kW | NW50 | NW40 |
