Refurbished Ebara ESA80-W Dry Pumps
Description:
This ESA80-W is a compound Multi Stage Dry Pump based on the same mechanical design as the A70W. The unit has been repackaged in a new chassis and enclosures, and has upgraded electronics as compared to the A Series version. The ESA80-W features a dry pump and blower both with water cooled canned motors driving tri-lobe roots pumping technology. Unlike the ESA70-W, the ESA80-W can produce the same pumping and vacuum performance with any input power frequency through the integration of an onboard Variable Frequency Drive. Due to its hot running design and high pumping speed, it is a popular choice for MOCVD reactors.
| Pumping Speed | Ultimate Pressure | Motor Power | Inlet | Exhaust |
|---|---|---|---|---|
| 300 CFM | 1 mTorr | 5.9 kW | NW50 | NW40 |
