Refurbished Edwards iH1000 Dry Pumps
Description:
The Edwards iH1000 Dry Pump was introduced as the follow-on to the iQDP80/QMB1200 dry pumping system. This 3rd generation of dry pumps from Edwards (also hook and claw design) is ideally suited for applications that benefit from higher operating temperatures. While running near 120 degree Celsius, process gases which would ordinarily condense inside a cooler pump will pass through freely, preventing the pump from seizing due to particulate accumulation. Like the iQDP pump, the iH1000 can be easily interfaced to process tools and offers a robust N2 purging system.
The iH1000 has been manufactured since the late 1990s and with a pumping speed of 580 CFM, its main competitors were the Ebara A150WM and the Alcatel ADS1202P. The iH1000 and was released in 5 vintages as follows. We recommend specifying the vintage you require when requesting pricing.
| Vintage | 208V 60Hz P/N | 380/415V 50Hz P/N |
|---|---|---|
| iH1000 | A533-83-945 | A533-83-946 |
| iH1000 Enhanced | A533-87-945 | A533-87-946 |
| iH1000 HEAC | A533-42-945 | A533-42-946 |
| iH1000 New Look | A533-52-945 | A533-52-946 |
| iH1000 Mark V | A590-30-945 | A590-30-946 |
Note: 480V 60Hz and 230V 50Hz Variants are Also Available. In addition Edwards manufactured several variants designed for demanding applications, including the iH1000SC and iH1000HTX, ask your Trillium account manager for details.
The iH1000 has the following specifications. Download the full manual below.
| Pumping Speed | Ultimate Pressure | Power | Dimensions (mm) | Weight | Oil Capacity |
|---|---|---|---|---|---|
| 580 CFM | 1 mTorr | 6.1 kW | 909 x 839 x 390 | 420 kg | 1.43 liters |
