Refurbished Edwards QDP80/QMB500 Dry Pumps
Description:
The Edwards QDP Series Dry Pumps are an excellent choice for primary pumping requirements in a wide range of applications. Their low capital and repair cost, ease of operation and interface ability with a wide range of process tools make them the preferred choice for upgrading rotary vane pumping systems.
Following the 1st generation of air cooled Edwards CDP and DP series dry pumps, the QDP80/QMB500 was launched featuring quieter water cooled motors and built in functionality for integration to a parent system. This 2nd generation of dry pumps from Edwards became the work horse of the semiconductor Industry in the mid 90’s, and many thousands are still in use today.
Mechanically, the QDP80/QMB500 shares essentially the same pump module as its predecessors, as well as its successor, the iQDP. The QDP gas purge system, while functionally similar to the iQDP as well, is set and adjusted manually. The QDP electrical and electronic controls and sensors are provided by separate control modules available in varying degrees of sophistication.
The addition of the QMB500 Booster Pump mounted on top of the QDP80 significantly increases pumping capacity. For a more compact pumping package, the QDP80 and QMB500 can be directly mounted, or for ease of moving the QDP80 and QMB500 independent, the QMB can mounted in a booster fame, under which the QDP will sit.
| Pumping Speed | Ultimate Pressure | Motor Power | Inlet | Exhaust |
|---|---|---|---|---|
| 272 CFM | 5 mTorr | 6.4 kW | ISO100 | NW40 |
