Ebara ESA series dry pumps are the workhorses for most MOCVD reactors, maintaining vacuum in the face of high hydride gas flows. Trillium provides refurbished ESA pumps as well as overhaul service for these units including full strip down, decontamination and rebuild/testing using new consumables, as well as new machined parts when required. If you need additional pumps or pump service, contact us at for more information.
