Trillium provides semiconductor end users with Refurbished Edwards Point-of-Use Abatement Systems to treat process exhaust gases on CVD, Etch and EPI applications. These systems are fully refurbished, including complete disassembly and decontamination, followed by consumable and major assembly rebuild or replacement. Each unit is fully tested by one of our abatement experts and then properly crated for shipment.  We offer on-site commissioning and training to ensure your tool or chamber install goes smoothly and you are equipped to operate and maintain your new system for years to come. Contact us for more information: 

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