Trillium offers exceptional support for Leybold E250 and DK200 rotary piston pumps, which are commonly used in cryogenic vessel evacuation applications. Our team has developed a robust machined parts manufacturing solution for the shaft, slides, cam and gears for these legacy pumps, enabling Trillium to continue service and support whether you repair them in house or send them in for repair. We can also help with replacement pumps – either refurbished Leybold units or by upgrading to dry screw technology with our TDS400Xi. If you need help with your E250 or DK200 please contact our Industrial Sales Team at
[Read more…]Trillium has invested heavily in engineering
A few common requests from semiconductor customers are lower cost, better performance, and increased chamber (tool) uptime. How does Trillium answer the bell? We have invested heavily in engineering very strict parts inspection criteria for critical parts.
[Read more…]Trillium history: 2009, Trillium acquired the TCU 40/80 product line
In 2009, Trillium acquired the TCU 40/80 product line from Edwards Vacuum. We continue to support end users globally with service and spare parts, as well as with additional chillers for new etcher installations. If you have chiller needs, Trillium can help with new and refurbished units, as well as with our proactive chiller repair service and replacement parts. Contact us to get the ball rolling:
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