A few common requests from semiconductor customers are lower cost, better performance, and increased chamber (tool) uptime. How does Trillium answer the bell? We have invested heavily in engineering very strict parts inspection criteria for critical parts.
Reusing a worn dry pump part, instead of replacing it, results in the following sub-optimal conditions:
- Internal leak back between compression stages
- Increased friction on rotating components
- Higher current and ultimate pressure
- Lower pumping speeds
When Trillium repairs a dry pump, we eliminate those conditions, so the pump operates efficiently and as designed. That means customers repair their pumps less frequently (lower cost and greater chamber up time) and they get the performance expected of a new pumping system (faster pump down, lower pressures, and higher energy efficiency). That’s why smart customers look at driving down the number of pump repairs and focus less on reducing unit costs. Quality is the key – please contact us for a professional dry pump repair that will increase your tool uptime.
