In 2009, Trillium acquired the TCU 40/80 product line from Edwards Vacuum. We continue to support end users globally with service and spare parts, as well as with additional chillers for new etcher installations. If you have chiller needs, Trillium can help with new and refurbished units, as well as with our proactive chiller repair service and replacement parts. Contact us to get the ball rolling:
Trillium TCU 40/80 chiller facts:
- Originally designed and manufactured by BOC Edwards
- Qualified on most LAM etch systems including the LAM 2300
- Available with analog and LonWorks interface
- 2000W (Standard) to 2500W (Plus) cooling capacity
- Fully supported by Trillium – service and spares
