Trillium offers exceptional support for Leybold E250 and DK200 rotary piston pumps, which are commonly used in cryogenic vessel evacuation applications. Our team has developed a robust machined parts manufacturing solution for the shaft, slides, cam and gears for these legacy pumps, enabling Trillium to continue service and support whether you repair them in house or send them in for repair. We can also help with replacement pumps – either refurbished Leybold units or by upgrading to dry screw technology with our TDS400Xi. If you need help with your E250 or DK200 please contact our Industrial Sales Team at
[Read more…]The 3 best ways to utilize the M350 helium compressor
Have you ever been looking for a particular shirt or pair of shoes, but no one has your size? Well, that happens a lot when selecting a compressor to drive cryo pumps or cold heads. Until now…. The M350 is the only compressor on the market designed specifically to drive two 8” pumps or one 10” cryo. It’s also capable of running OnBoard® pumps and cold heads as well. So, if you want save money by avoiding buying two compressors that are too small or one compressor that’s too big, the M350 is for you. Contact us today to learn more!
[Read more…]Upgrade your LAM etch chillers to modern tech!
Anyone who uses legacy LAM Etchers knows that their chillers are critical in ensuring high wafer yield for the fab. Sadly, the primary manufacturers for the chillers on these systems are no longer supporting this older technology. While we do our best to repair these old chillers, it is getting harder and harder to keep them going. Added to this, these old Freon based units are energy hogs compared to newer Peltier device technology which uses a “graduated, on demand” approach when drawing electricity. Older units consume about the same amount of electricity all the time, whether idle or actively removing heat from the Etcher. There couldn’t be a better time to upgrade these old chillers, with fab utilization and chamber uptime more important than ever. Contact us to discuss upgrading at
[Read more…]Low cost wet pump upgrade options
Many customers continue to rely on oil-sealed rotary vane pumps for many applications. They often struggle with issues related to vacuum oil, including oil leaks, dealing with used oil after oil changes, and oil back-streaming issues that impact their production process. Trillium US Inc. offers some low cost dry pump upgrades that are perfect for customers who want to eliminate the problems mentioned above but don’t want to spend $15-$30K for a new dry pumping system. If you would be interested in upgrading, and you have 3 phase power and process cooling water available at your facility, please reach out to us for more information.
[Read more…]Top 10 reasons to purchase a refurbished Edwards abatement system
Trillium provides semiconductor end users with Refurbished Edwards Point-of-Use Abatement Systems to treat process exhaust gases on CVD, Etch and EPI applications. These systems are fully refurbished, including complete disassembly and decontamination, followed by consumable and major assembly rebuild or replacement. Each unit is fully tested by one of our abatement experts and then properly crated for shipment. We offer on-site commissioning and training to ensure your tool or chamber install goes smoothly and you are equipped to operate and maintain your new system for years to come. Contact us for more information:
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