Rotary Piston Vacuum Pumps are legendary for their ruggedness and reliability, thanks to their slow rotational speed and robust, but simple design. Invented in the early 20th century, these type of pumps are still in use today and are popular in metallurgy, space simulation and vacuum drying applications. Trillium US Inc. manufactures the Univac line of Piston Pumps, which are based on the tried and true Stokes H-10/11 series pumps. As a bolt-for-bolt drop in replacement for the Stokes 412, 212 and 148, the Univac 400, 200 and 100 are a competitive alternative with much shorter lead times. Contact us today for more info:
[Read more…]Looking to modernize your compressor fleet, reduce energy or increase reliability?
Looking to modernize your compressor fleet, reduce energy or increase reliability? Trillium’s M600 is ideally suited to achieve these goals, especially for Semiconductor Fab end users. The M600 replaces multiple 9600s on AMAT Endura ® PVD systems – run (2) M600s instead of (3) 9600s. The same is true for Ion Implanters – the M600 replaces many multiple cryo/compressor configurations with a single unit as it can more effectively drive systems with (1) 8” and (1) 10” cryo. Contact us for more details:
[Read more…]Trillium has invested heavily in engineering
A few common requests from semiconductor customers are lower cost, better performance, and increased chamber (tool) uptime. How does Trillium answer the bell? We have invested heavily in engineering very strict parts inspection criteria for critical parts.
[Read more…]Trillium history: 2009, Trillium acquired the TCU 40/80 product line
In 2009, Trillium acquired the TCU 40/80 product line from Edwards Vacuum. We continue to support end users globally with service and spare parts, as well as with additional chillers for new etcher installations. If you have chiller needs, Trillium can help with new and refurbished units, as well as with our proactive chiller repair service and replacement parts. Contact us to get the ball rolling:
[Read more…]Univac 600 and Stokes 615 blower = improved efficiency and reliability
How can Univac 600 and Stokes 615 blower users improve the efficiency and reliability of their vacuum systems, while reducing energy consumption? Easy. Upgrade your lobes to Trillium’s new energy efficient light-weight lobe design. This upgrade can be accomplished as part of a rebuild, exchange or outright purchase of a new Univac 600 booster. If the latter, we even offer trade in value for your used Stokes 615. Contact us for more information.
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