Refurbished Vector Ultra Si Wet Scrubber
Description:
The Vector Ultra Si is a wet scrubber type abatement system originally produced by Ecosys, who were subsequently acquired (in chronological order) by ATMI, Metron and Applied Materials.
The Vector Ultra Si s designed specifically for CVD applications and can be configured with 1-4 inlets. The Vector Ultra Si features a special inlet entry to prevent concerns such as clogging and corrosion.
Trillium provides end users with refurbished Vector Ultra Sis, spare parts and on-site service to improve system reliability and uptime.
Specifications for the Vector Ultra Si are below.
| Inlets | Voltage | Dimensions (WDH) | Max Flow Rates |
|---|---|---|---|
| 1-4 | 200-230V 3 Ph | 27″ x 36.3″ x 84″ | 250 SLM |
