Refurbished Edwards iL70 Dry Pumps
Description:
The Edwards iL70 Dry Pump was introduced as the follow-on to the iQDP Series dry pumping system and to compliment the Harsh iH Series. Designed for the cleaner applications, it offers a low cost vacuum solution for load locks and alike. Some variants offer the addition of a simple N2 purge capability, however the pump was designed to be able to run without. It’s lower power consumption make it an ideal pump for retrofitting installations where Edwards QDP80s and iQDP80s are present.
| Pumping Speed | Ultimate Pressure | Motor Power | Inlet | Exhaust |
|---|---|---|---|---|
| 49 CFM | 23 mTorr | 2.2 kW | ISO63 | NW40 |
