Trillium provides semiconductor end users with Refurbished Edwards Point-of-Use Abatement Systems to treat process exhaust gases on CVD, Etch and EPI applications. These systems are fully refurbished, including complete disassembly and decontamination, followed by consumable and major assembly rebuild or replacement. Each unit is fully tested by one of our abatement experts and then properly crated for shipment. We offer on-site commissioning and training to ensure your tool or chamber install goes smoothly and you are equipped to operate and maintain your new system for years to come. Contact us for more information:
- Massive cost savings vs. New
- Proven and effective DRE
- Large install base globally
- Fully supported by the OEM and Trillium
- Re-use of used equipment is environmentally friendly
- Refurbished to like-new condition
- 12 month warranty
- Expert on-site commissioning available
- Standardization of Existing abatement
- Customized to end user need
Available models:
Refurbished Dry Scrubbers:
Edwards M150 GRC
Edwards D150 GRC
Refurbished Hybrid Scrubbers:
Edwards TPU
Edwards TCS
Edwards Helios
Edwards Kronis
